A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Alberto Gasparotto Davide Barreca |
| Publication date | September 2008 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |