High resolution-high energy x-ray photoelectron spectroscopy using third-generation synchrotron radiation source, and its application to Si-high k insulator systems
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author: Tetsuya Ishikawa Kensuke Kobayashi Shik Shin Yasutaka Takata Makina Yabashi Takashi Tokushima Osamu Nakatsuka Kenji Tamasaku |
| Publication date | August 4, 2003 |
| Language | English |
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