Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining
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author: Tetsuya Ishikawa Makina Yabashi Hidekazu Mimura Kazuto Yamauchi Yuzo Mori Alexei Souvorov Katsuyoshi Endo Yasuhisa Sano Kenji Tamasaku |
| Publication date | October 2003 |
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