Dual source APCVD synthesis of TaN and NbN thin films on glass from the reaction of MCl5 (M = Ta, Nb) and 1,1,1,3,3,3-hexamethyldisilazane
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| Description | article published in 2004 |
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author: Claire J. Carmalt Ivan P. Parkin |
| Publication date | 2004 |
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