Conformity of Aluminum Thin Films Deposited onto Micro-Patterned Silicon Wafers by Pulsed Laser Deposition, Magnetron Sputtering, and CVD
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| Description | scholarly article by Anne-Lise Thomann et al published December 2011 in Chemical Vapor Deposition |
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author: Constantin Vahlas |
| Publication date | December 2011 |
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