Process-structure-properties relationship in direct liquid injection chemical vapor deposition of amorphous alumina from aluminum tri-isopropoxide
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| Description | scholarly article by Pierre-Luc Etchepare et al published 26 May 2015 in Physica Status Solidi C: Current Topics in Solid State Physics |
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author: Constantin Vahlas |
| Publication date | May 26, 2015 |
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