Erratum to: “Damage profiles in as-implanted 〈100〉 Si crystals: strain by X-ray diffractometry versus interstitials by RBS-channeling” [Nucl. Instr. and Meth. B 120 (1996) 64–67]
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| Description | scholarly article published in Nuclear Instruments & Methods in Physics Research B |
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| Publication date | March 1997 |
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