Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances
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| Description | article published in 2009 |
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author: Nicolas Leclerc Raluca Tiron Cyril Brochon Christophe A Serra |
| Publication date | March 20, 2009 |
| Language | English |
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