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Zirconocene Alkoxides, Promising Precursors for MOCVD of Zirconium Dioxide Thin Films

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Description scholarly article by Andrea Sartori et al published 8 May 2012 in Chemical Vapor Deposition
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author: Naida El Habra  Rosalba Gerbasi  Cinzia Sada 

Publication date May 8, 2012
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