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Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

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Description scientific article published on 01 November 2015
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author: Artur Hermans  Martti Kauranen  Stéphane Clemmen  Jolien Dendooven  Kalle Koskinen 

Publication date November 1, 2015
Language English
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