Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Paulo F P Fichtner Martina Luysberg |
| Publication date | |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |