Pattern transfer by dry etching through stencil masks
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| Description | article by Stella W. Pang published January 1988 in Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena |
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author: Stella W. Pang |
| Publication date | January 1988 |
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| Missing/wrong data? | Edit Wikidata item |