High resolution patterning on nonplanar substrates with large height variation using electron beam lithography
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| Description | article by Vishva Ray et al published November 2012 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
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author: Stella W. Pang |
| Publication date | November 2012 |
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