3D silicon sensors: Design, large area production and quality assurance for the ATLAS IBL pixel detector upgrade

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author: C. Fleta  Gian-Franco Dalla Betta  Sebastian Grinstein  Giulio Pellegrini  Maurizio Boscardin  Philippe Grenier  Nicola Zorzi  Giovanni Darbo  Claudia Gemme  Cinzia Da Via 

Publication date December 2012
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