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3D silicon sensors - Large area production, QA and development for the CERN ATLAS experiment pixel sensor upgrade

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author: C. Fleta  Gian-Franco Dalla Betta  Sebastian Grinstein  Giulio Pellegrini  Philippe Grenier  Nicola Zorzi  Giovanni Darbo  Christopher J Kenney  Sherwood Ira Parker  Cinzia Da Via 

Publication date October 2012
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