Missing/wrong data?
Log in to edit
Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of (Ultra)Nanocrystalline Diamond Films
article
Author/s
author: Erik C. Neyts, Annemie Bogaerts
Work details
Publication date
July 2008
-
-
Language
English
Copyright status
Copyright status information is not available for this work. The copyright status depends on the jurisdiction, the author's date of death and the date the work was created or published.
To learn more about copyright terms in different countries, visit the countries and terms page.