Chemically Conformal ALD of SrTiO[sub 3] Thin Films Using Conventional Metallorganic Precursors
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Seong Keun Kim Cheol Seong Hwang |
| Publication date | 2005 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |