Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability
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| Description | scholarly article by Minha Seo et al published 2008 in Journal of Materials Chemistry |
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author: Seong Keun Kim Cheol Seong Hwang |
| Publication date | 2008 |
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