Nanostructured Fe2 O3 Processing via Water-Assisted ALD and Low-Temperature CVD from a Versatile Iron Ketoiminate Precursor
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author: Maximilian Gebhard Hans-Werner Becker Andreas Ostendorf Alexander Sadlo Markus Grafen Detlef Rogalla Daniel Peeters Lukas Mai |
| Publication date | May 8, 2017 |
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