Two-step method for the deposition of AlN by radio frequency sputtering
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| Description | scholarly article by L. Monteagudo-Lerma et al published October 2013 in Thin Solid Films |
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author: Eva Monroy Arántzazu Núñez-Cascajero |
| Publication date | October 2013 |
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| Missing/wrong data? | Edit Wikidata item |