Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Elvira Fortunato A.R. Ramos Paula M. Vilarinho E. Alves Isabel Maria Ferreira |
| Publication date | June 2006 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |