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The Effect of Film Thickness on the Suitability of Titanium Oxynitride (TiNxOy,x +y = 1) Films as Heat Mirrors – Formed by the Atmospheric Pressure CVD of TiCl4 and NH3

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Description scholarly article by Geoffrey Hyett et al published December 2007 in Chemical Vapor Deposition
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author: Geoffrey Hyett 

Publication date December 2007
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