Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions
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| Description | article |
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author: Salvador Eslava Francesca Iacopi Christine Eva Antonia Kirschhock Johan A. Martens |
| Publication date | August 18, 2008 |
| Language | English |
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