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Impact of mechanical stress on ferroelectricity in (Hf0.5Zr0.5)O2 thin films

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author: Osami Sakata  Yasuhiko Imai  Hiroshi Funakubo  Toyohiko J. Konno  Kiliha Katayama  Takahiro Oikawa  Takao Shimizu  Takanori Kiguchi  Tatsuhiko Yokouchi 

Publication date June 27, 2016
Language English
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