Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing
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author: Osami Sakata Hiroshi Funakubo Toyohiko J. Konno Kiliha Katayama Takao Shimizu Akihiro Akama Takanori Kiguchi |
| Publication date | August 1, 2016 |
| Language | English |
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