Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf 0.5 Zr 0.5 )O 2 thin films deposited on various substrates
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author: Osami Sakata Yasuhiko Imai Hiroshi Funakubo Toyohiko J. Konno Kiliha Katayama Takahiro Oikawa Takao Shimizu Takanori Kiguchi Tatsuhiko Yokouchi |
| Publication date | November 2017 |
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