Erratum: “Influence of deposition temperature on the structure and internal stress of TiN films deposited by filtered cathodic vacuum arc” [J. Vac. Sci. Technol. A 20, 1270 (2002)]
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| Description | scholarly article published in Journal of Vacuum Science & Technology A |
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author: Shu Ping Lau |
| Publication date | March 2003 |
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