Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Xiao Hu |
| Publication date | September 15, 2002 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |