Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon
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| Description | scholarly article by Kaupo Kukli et al published May 2002 in Thin Solid Films |
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author: Timo Sajavaara Mikko Ritala Anders Hårsta Kaupo Kukli Teet Uustare Markku Leskela |
| Publication date | May 2002 |
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