Comparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors
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| Description | scholarly article by Kaupo Kukli et al published September 2002 in Thin Solid Films |
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author: Timo Sajavaara Mikko Ritala Kaupo Kukli Markku Leskela |
| Publication date | September 2002 |
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