Evaluation of New Aminoalkoxide Precursors for Atomic Layer Deposition. Growth of Zirconium Dioxide Thin Films and Reaction Mechanism Studies
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| Description | scholarly article by Raija Matero et al published December 2004 in Chemistry of Materials |
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author: Timo Sajavaara Mikko Ritala Raija Matero Markku Leskela |
| Publication date | December 2004 |
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