Atomic layer deposition of hafnium dioxide thin films from hafnium tetrakis(dimethylamide) and water
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| Description | scholarly article by Kaupo Kukli et al published November 2005 in Thin Solid Films |
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author: Timo Sajavaara Mikko Ritala Kaupo Kukli Markku Leskela |
| Publication date | November 2005 |
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