Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films
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| Description | scholarly article by Aile Tamm et al published 2010 in Journal of the Electrochemical Society |
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author: Aile Tamm Timo Sajavaara Mikko Ritala Marianna Kemell Massimo Tallarida Kaupo Kukli Väino Sammelselg Markku Leskela |
| Publication date | 2010 |
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