Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures
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| Description | scholarly article by Jani Hämäläinen et al published 2011 in Journal of Materials Chemistry |
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author: Timo Sajavaara Mikko Ritala Timo Hatanpää Jani Hämäläinen Esa Puukilainen Markku Leskela |
| Publication date | 2011 |
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