Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen
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| Description | scholarly article by Kaupo Kukli et al published 2011 in Journal of the Electrochemical Society |
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author: Timo Sajavaara Mikko Laitinen Mikko Ritala Jonas Sundqvist Marianna Kemell Massimo Tallarida Kaupo Kukli Aleks Aidla Esa Puukilainen Markku Leskela |
| Publication date | 2011 |
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