Atomic Layer Deposition of Osmium
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| Description | scholarly article by Jani Hämäläinen et al published 9 December 2011 in Chemistry of Materials |
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author: Timo Sajavaara Mikko Ritala Jani Hämäläinen Esa Puukilainen Markku Leskela |
| Publication date | December 9, 2011 |
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