Evaluation and Comparison of Novel Precursors for Atomic Layer Deposition of Nb2O5 Thin Films
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author: Timo Sajavaara Mikko Ritala Mikko Heikkilä Kaupo Kukli Esa Puukilainen Timothee Blanquart Markku Leskela |
| Publication date | February 21, 2012 |
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