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Why are hydrogen ions best for MeV ion beam lithography?

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author: Nitipon Puttaraksa  Rattanaporn Norarat  Timo Sajavaara  Mikko Laitinen  Mari Napari  Orapin Chienthavorn  Harry J Whitlow  A.R. Ananda Sagari  Mika Pettersson 

Publication date February 2013
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