Atomic Layer Deposition of LiF Thin Films from Lithd, Mg(thd)2, and TiF4 Precursors
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author: Timo Sajavaara Mikko Ritala Miia Mäntymäki Jani Hämäläinen Esa Puukilainen Markku Leskela |
| Publication date | April 10, 2013 |
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