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Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

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Description scholarly article by Ville Miikkulainen et al published January 2015 in Journal of Vacuum Science & Technology A
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author: Timo Sajavaara  Mikko Laitinen  Ville Miikkulainen  Ola Nilsen  Helmer Fjellvåg 

Publication date January 2015
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