Adsorption and surface diffusion of silicon growth species in silicon carbide chemical vapour deposition processes studied by quantum-chemical computations
| Image |  |
|---|---|
| Description | article |
| Author/s |
author: Lars Ojamäe Henrik Pedersen Erik Janzén |
| Publication date | October 16, 2013 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |