Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor
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| Description | scholarly article by Pontus Stenberg et al published 2017 in Journal of Materials Chemistry C |
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author: Örjan Danielsson Edvin Erdtman Lars Ojamäe Henrik Pedersen Erik Janzén |
| Publication date | 2017 |
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