A Morphological, Chemical and Electrical Study of HfSiON Films for Inter Poly Dielectric Applications in Flash Memories
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Giuseppe Pavia Claudia Wiemer Annalisa Del Vitto Rossella Piagge Enrica Ravizza Gabriella Ghidini Massimo Caniatti |
| Publication date | 2007 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |