Effect on Al:MO2/In0.53Ga0.47As interface (M=Hf, Zr) of trimethyl-aluminum pre-treatment during atomic layer deposition
| Image |  |
|---|---|
| Description | scholarly article by Alessio Lamperti et al published July 2014 in Thin Solid Films |
| Author/s |
author: Elena Cianci Claudia Wiemer Alessio Lamperti Alessandro Molle |
| Publication date | July 2014 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |