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Interface Trap Density Metrology of State-of-the-Art Undoped Si n-FinFETs
scholarly article by Giuseppe C. Tettamanzi et al published April 2011 in IEEE Electron Device Letters
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author: Giuseppe C. Tettamanzi, Gerhard Klimeck, Sven Rogge, Serge Biesemans, Sunhee Lee, Nadine Collaert, Abhijeet Paul, Saumitra Mehrotra
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Publication date
April 2011
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