Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures
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| Description | scientific article published on 13 June 2018 |
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author: Frank Lungwitz Gintautas Abrasonis Robert Wenisch Johannes von Borany Matthias Krause Ramón Escobar-Galindo Sibylle Gemming |
| Publication date | June 13, 2018 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |