Fabrication of submicron suspended structures by laser and atomic force microscopy lithography on aluminum combined with reactive ion etching
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| Description | scholarly article by Anja Boisen published November 1998 in Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena |
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author: Anja Boisen |
| Publication date | November 1998 |
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