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Formation of nickel germanides from Ni layers with thickness below 10 nm

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Description scholarly article by Lukas Jablonka et al published March 2017 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
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author: Christian Lavoie  Daniel Primetzhofer 

Publication date March 2017
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