Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask
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| Description | scholarly article by Takuya Fujii et al published March 2017 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
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author: Takeru Okada |
| Publication date | March 2017 |
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