Sub-10 nm plasma nanopatterning of InGaAs with nearly vertical and smooth sidewalls for advanced n-fin field effect transistors on silicon
| Image |  |
|---|---|
| Description | article |
| Author/s |
author: Bassem Salem |
| Publication date | March 2017 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |